发明名称 High-contrast laser mark on substrate surfaces
摘要 As part of a first configured laser operation, a smooth, more reflective marking area is formed at a surface of a substrate (e.g., integral heat spreader, or IHS). In a second configured laser operation, a mark is formed at the surface of the substrate within the marking area. The mark contrasts strongly with the reflective surface of the substrate in the marking area. As a result, the mark may be read with an optoelectronic imaging system with a higher rate of reliability than marks disposed at a substrate surface having a microtopographical profile with greater variation from a nominal surface plane. An IHS with a mark so disposed provides benefits when include as a portion of an integrated circuit package, which in turn provides benefits when included as a portion of an electronic system.
申请公布号 US7989967(B2) 申请公布日期 2011.08.02
申请号 US20090500547 申请日期 2009.07.09
申请人 INTEL CORPORATION 发明人 LOON LEE KIM
分类号 H01L23/544;H01L21/301;H01L21/46;H01L21/76;H01L21/78 主分类号 H01L23/544
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