发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 According to one embodiment of the present invention, disclosed are a semiconductor device and a manufacturing method thereof. The technical objective of the present invention is to provide a semiconductor device and a manufacturing method thereof, to use normal bumping equipment, so as to have an interposer not having a through-silicon via (TSV). To this end, the semiconductor device comprises: an interposer including a redistribution layer and a protection layer to cover the redistribution layer; a semiconductor die penetrating the protection layer of the interposer to connect to the redistribution layer; and a resin to mold the semiconductor die. The interposer is formed to sequentially form a first seed layer and a first redistribution layer under the protection layer, a bump seed layer penetrating the protection layer is directly formed on the first seed layer, and a micro bump pad connected to the semiconductor die is formed on the bump seed layer.
申请公布号 KR20160112210(A) 申请公布日期 2016.09.28
申请号 KR20150037481 申请日期 2015.03.18
申请人 AMKOR TECHNOLOGY KOREA, INC. 发明人 KIM, DONG JIN;KIM, JIN HAN;DO, WON CHUL;KIM, DO HYUNG;LEE, JI HUN;HAN, DONG HOON;BAE, JAE HUN;KI, WON MYOUNG;PARK, JUN HWAN;SON, SEUNG NAM;CHO, HYUN
分类号 H01L21/768;H01L21/56;H01L23/00 主分类号 H01L21/768
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