Method of tip shape of cutting member, semiconductor chip manufacturing method, circuit board, and electronic apparatus

摘要

A design method includes a process of preparing plural cutting members having different degrees of taper in a tip portion thereof, a process of preparing plural grooves on a front surface side having the same shape, a process of confirming a breakage status when a groove on a rear surface side is formed by the plural cutting members, and a process of selecting, when it is confirmed that both of a cutting member that causes breakage and a cutting member that does not cause the breakage are included, the degree of taper of the cutting member that does not cause the breakage as a tip shape of a cutting member to be used in a mass production process.

主权项

1. A design method of a tip shape of a cutting member used in a semiconductor piece manufacturing method including
forming a groove on a front surface side on a front surface of a substrate, and forming a groove on a rear surface side that communicates with the groove on the front surface side by a rotating cutting member that has a thickness larger than the width of the groove on the front surface side from a rear surface of the substrate and individualizing the substrate into semiconductor pieces having a step portion formed by a difference between the width of the groove on the front surface side and the width of the groove on the rear surface side, the design method comprising: preparing a plurality of cutting members having different degrees of taper in a tip portion thereof; preparing a plurality of grooves on the front surface side having substantially the same shape; confirming a breakage status of the step portion with respect to respective cases where the groove on the rear surface side is formed by the plural cutting members with respect to the plural grooves on the front surface side; and selecting, when it is confirmed that both of a cutting member that causes breakage of the step portion and a cutting member that does not cause the breakage of the step portion are included in the plurality of cutting members, the degree of taper of the cutting member that does not cause the breakage of the step portion as a tip shape of a cutting member to be used in a mass production process.