发明名称 Singulation apparatus and method
摘要 A singulation apparatus and method including: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device with members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device with members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being configured and arranged for cutting the workpiece.
申请公布号 US9508570(B2) 申请公布日期 2016.11.29
申请号 US201314058396 申请日期 2013.10.21
申请人 ASM TECHNOLOGY SINGAPORE PTE LTD 发明人 Cheng Chi Wah;Chow Eric Lap Kei;Tang Joseph Hoi Shuen;Liu Chun Kit
分类号 H01L21/67;B28D5/02;H01L21/687 主分类号 H01L21/67
代理机构 Ostrolenk Faber LLP 代理人 Ostrolenk Faber LLP
主权项 1. A singulation apparatus, comprising: at least one chuck station to which one or more workpieces are securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device mounted to the bridge and being independently movable along the first side, transversely to the feed direction, wherein the first cutting device comprises a first cutting member and second cutting member movably mounted on the first side of the bridge; and a second cutting device mounted to the bridge and being independently movable along the second side, transversely to the feed direction, wherein the second cutting device comprises a third cutting member and a fourth cutting member movably mounted on the second side of the bridge, each of the first, second, third, and fourth cutting members being configured and arranged to be independently movable with respect to one another for cutting the one or more workpieces.
地址 Singapore SG