| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a total reflection X-ray analysis device suitable for replaced, and used, for an X-ray extraction opening portion in an external X-ray source facility. SOLUTION: An X-ray from an external X-ray source is, through a slit 1 and an incident X-ray detector 2, reflected on the measurement surface of a sample on a sample holding member 3 on a sample stage 4, then made incident on a total reflection X-ray detector 5 of a detector stage 6. The slit 1, the incident X-ray detector 2, and a sample stage 4 are placed on a base stage 7 while the base stage 7 is placed on a vertical movable stage 8, so, by vertically moving the base stage 7, an incident X-ray axis is matched with the measurement surface of sample. The sample stage 4 is turned against the X-ray axis, the sample placed on the sample stage 4 is tilted, and a reflected X-ray from the measurement surface is measured with the reflection X-ray detector 5 which rotates around the center of reflection position of X-ray. The base stage 7 comprises the slit 1, the incident X-ray detector 2, and the sample stage 4, so that the weight of the base stage is reduced for avoiding such defect as deflection.</p> |
