| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate carrier and transfer device which is high in carrier efficiency and can carry in and out a plurality of substrates simultaneously at the pitches different from those of substrate cassettes on a plurality of substrate processing devices capable of processing a plurality of substrates simultaneously. SOLUTION: A carrier vehicle 1 on which a plurality of substrates 4 can be mounted can move reciprocably on a route 2, and a plurality of vacuum processing devices 8 and substrate buffers are installed vertically to the route 2. Also a pitch to support substrates on a substrate loader mounted on the carrier vehicle 1, a pitch of substrates in the vacuum processing device 8, and a substrate pitch of substrate buffers are the same to each other to ensure that a plurality of substrates 4 can be received and delivered simultaneously. In addition, the transport of the substrates 4 between a substrate cassette 3 and the carrier vehicle 1 is performed by a substrate transfer robot 5, the carrier vehicle 1 is moved on the route 2, and a plurality of processed substrates simultaneously to each vacuum processing device 8 so as to carry out a plurality of unprocessed substrates simultaneously. |
