发明名称 |
HIGH TEMPERATURE, HIGH STRENGTH, COLORABLE MATERIALS FOR DEVICE PROCESSING SYSTEMS |
摘要 |
Electrostatic-discharge safe devices for processing electronic components, e.g., matrix trays, chip trays, and wafer carriers are disclosed that are made from a mixture of a high temperature, high strength polymer and at least one metal oxide, and optionally with at least one pigment. The use of the metal oxides as conductive materials advantageously allows for light-colored electrostatic-discharge safe materials to be made. Such materials may be colored with pigments without compromise of material performance specifications. |
申请公布号 |
WO2004033103(A3) |
申请公布日期 |
2005.02.24 |
申请号 |
WO2003US32197 |
申请日期 |
2003.10.09 |
申请人 |
ENTEGRIS, INC.;EXTRAND, CHARLES, W.;BUCHA, ROBERT |
发明人 |
EXTRAND, CHARLES, W.;BUCHA, ROBERT |
分类号 |
F16L1/00;H01L21/673 |
主分类号 |
F16L1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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