TEMPERATURE CONTROL METHOD, TEMPERATURE CONTROLLER AND HEAT TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To reduce the dispersion of heat treatment of a treatment object 3 to be heat treated in a heat treatment part 6 regardless of the temperature fluctuation of a housing 5. SOLUTION: A correction equation is determined based on correlation data of preliminarily measured temperatures of the housing 5 and in the heat treatment of the treatment object 3. A temperature controller 2 detects the temperature of the housing 5 by a second temperature sensor 10, calculates a correction value according to the correction equation based on this detected temperature, and corrects at least either a set temperature of the heat treatment part 6 or the detected temperature of the heat treatment part 6. COPYRIGHT: (C)2006,JPO&NCIPI