| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet microscope which is excellent in wavelength selectivity, of which optical alignment is easy, furthermore, and which is miniaturized and also is inexpensive. SOLUTION: DUV light rays are taken out by performing reflection of light rays from a light source 14a including wavelength in an ultraviolet region by predetermined spectral characteristics twice for each, four times in total using two interference filters, a first interference filter 131 and a second interference filter 132 of a wavelength selection device 13, the sample is irradiated with the DUV light rays and a magnified optical image is observed by the light from the sample. COPYRIGHT: (C)2006,JPO&NCIPI
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