MANUFACTURING METHOD FOR RADIATION IMAGE CONVERSION PANEL, AND MANUFACTURING DEVICE FOR RADIATION IMAGE CONVERSION PANEL

摘要

PROBLEM TO BE SOLVED: To manufacture a radiation image conversion panel capable of restraining a point defect from being generated, and capable of obtaining an image of high grade reduced in a defect. SOLUTION: This manufacturing method for forming a phosphor layer by a vapor deposition method in a closed vacuum chamber 12 has a process for setting a substrate 70 in the vacuum chamber 12, a process for removing dust from a surface 70d of the substrate under the condition where the substrate 70 is set, and a process for forming the phosphor layer on the substrate. COPYRIGHT: (C)2007,JPO&INPIT