| 摘要 |
PROBLEM TO BE SOLVED: To provide a detection sensor and oscillator capable of improving sensitivity. SOLUTION: A through hole 60 and a recessed part are formed in the oscillator 30, and the surface area is increased, thereby improving the detection sensitivity of the oscillator 30 to improve the sensitivity of the detection sensor 10. At this time, when the through hole 60 is assumed to be a square whose one side length is (a), and have opening area A(=a<SP>2</SP>) and opening peripheral length C(=4a), the porosity (p), opening area A and opening peripheral length C are preferably set so as to establish condition p((CT/(2A))-1)>0 where the surface area variation amount of the oscillator 30 due to forming the through hole 60 is positive. COPYRIGHT: (C)2007,JPO&INPIT
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