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发明名称
摘要
申请公布号
JP3992366(B2)
申请公布日期
2007.10.17
申请号
JP19980176511
申请日期
1998.05.20
申请人
发明人
分类号
H01J37/20;H01J37/317;H01J37/02;H01J37/077;H01L21/265
主分类号
H01J37/20
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