发明名称 LENS ASSEMBLY FOR ELECTRON COLUMN
摘要 <p>The present invention relates to a lens assembly for an electron column and, more particularly, to a lens assembly that can prevent voltage or current, which is applied to any one of the lens layers of the electron column, from leaking to another layer.</p>
申请公布号 WO2008032971(A1) 申请公布日期 2008.03.20
申请号 WO2007KR04379 申请日期 2007.09.10
申请人 KIM, HO SEOB;CEBT CO. LTD. 发明人 KIM, HO SEOB
分类号 H01J37/141 主分类号 H01J37/141
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