| 摘要 |
Optical assembly supported in an arrangement, especially in an objective ( 1, 8 ) or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens ( 34, 35 ), a mirror, or an aperture ( 9 ), wherein the at least one element is influenceable by at least one manipulator and wherein (i) the at least one manipulator ( 10, 22, 25 ) is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator ( 10, 22, 25 ) and the element to be influenced by the manipulator ( 10, 22, 25 ) in the interior of the arrangement, (ii) the manipulator comprises a mechanism for adjusting precisely or for micro-adjusting of the optical element, or (iii) the manipulator comprises a first and a second means wherein the first means generates a repelling force and/or a repelling torque and the second means ( 5, 6, 11, 15, 19 ) counteracts the repelling force and/or the repelling torque generated by the first means and at least partially compensates for the force and/or the torque generated by the first means.
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