| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device capable of displaying a maintenance screen easy to maintain on a display panel even when the size of a system is increased and the number of management items is increased; a display method of a display panel in maintaining such a substrate processing device; a program; and a recording medium. SOLUTION: For instance, a typical structure in a processing chamber 140E is displayed in a first display region 311a of the display panel 301, and a plurality of parts A1-A8 are displayed in colors different from each other on a part basis. In a second display region 311b of the display panel 301, for instance, a plurality of parameter values of a first high-frequency poser source 40 measured by a voltmeter, an ammeter and the like are enumerated and displayed in colors corresponding to the colors for the respective parts A1-A8 on the basis of each of the plurality of parts A1-A8. COPYRIGHT: (C)2009,JPO&INPIT
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