LOAD PORT DEVICE, AND WAFER STATE CORRECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a load port device capable of stably carrying a wafer by detecting a forward sagging state of the wafer, and correcting the forward sagging state by using a simple mechanism. SOLUTION: This load port device equipped with a table for mounting a carrier for housing a wafer therein is provided with a mechanism for allowing a movable element to execute projecting/retracting operations from a carrier mounting surface of the table. When the wafer in the carrier is in a forward sagging state, vibration is applied to the carrier by operating the movable element to correct the forward sagging state of the wafer to a state parallel to a robot hand. COPYRIGHT: (C)2009,JPO&INPIT