摘要 |
PROBLEM TO BE SOLVED: To provide a method for effectively filling hydrogen into a fused silica of post-consolidation. SOLUTION: A method of producing a fused silica article having a concentration of hydroxyl (OH) groups of up to about 60 ppm by weight and a combined concentration of light hydrogen and deuterium in a range from about 1×10<SP>16</SP>molecules/cm<SP>3</SP>up to about 6×10<SP>19</SP>molecules/cm<SP>3</SP>is provided. In some embodiments, deuterium is present in an amount greater than its natural isotopic abundance. The method includes the steps of providing a fused silica boule, diffusing at least one of light hydrogen and deuterium into the boule, and annealing the boule to form the fused silica article. A method of diffusing hydrogen into fused silica and a fused silica article filled with hydrogen formed by the method are also described. COPYRIGHT: (C)2009,JPO&INPIT |