OPTICAL SCANNING DEVICE, METHOD FOR MANUFACTURING SAME, AND OPTICAL SCANNING CONTROL DEVICE

摘要

Provided is an optical scanning device for scanning incident light by pivoting a mirror. The optical scanning device comprises a displacement sensor for detecting an oscillation angle of the mirror, and a temperature sensor for compensating for the temperature of the displacement sensor. The displacement sensor is a piezoelectric sensor in which a lower electrode, a piezoelectric film, and an upper electrode are sequentially laminated. The temperature sensor is a resistance temperature detector formed in the same layer as the lower electrode.