| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for the production of a carboxyl-containing resin having suppressed lot-to-lot variation and useful as a resist material, etc., having a half ester structure and good aging stability. SOLUTION: This carboxyl-containing resin is produced by charging a solvent in a manner to keep the ratio of acid anhydride to charged hydroxy compound to <100 equivalent % at the reaction and the total concentration of the acid anhydride and the hydroxy compound to 40-75 wt.%, homogeneously dissolving the charged raw materials at 90-140 deg.C and performing the 1st-stage reaction and subsequently heating at 40-80 deg.C for 3-15 hr to perform the 2nd-stage reaction and aging. |
