| 发明名称 |
METHOD AND DEVICE FOR PLASMA TREATING WORKPIECES |
| 摘要 |
<p>Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (4) of a treatment station, which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. A shell-type sealing element (28) is disposed relative to a floor (29) of the chamber in order to seal an interior space of the workpiece.</p> |
| 申请公布号 |
EP1507884(A1) |
申请公布日期 |
2005.02.23 |
| 申请号 |
EP20030724884 |
申请日期 |
2003.05.09 |
| 申请人 |
SIG TECHNOLOGY LTD. |
发明人 |
LITZENBERG, MICHAEL;LEWIN, FRANK;MÜLLER, HARTWIG;VOGEL, KLAUS;ARNOLD, GREGOR;BEHLE, STEPHAN;LÜTTRINGHAUS-HENKEL, ANDREAS;BICKER, MATTHIAS;KLEIN, JÜRGEN |
| 分类号 |
B65B55/08;A61L2/14;B01J3/00;B01J19/08;B05D7/24;B08B7/00;B08B9/42;B29C49/42;B65D23/02;B65G29/00;C03C17/00;C23C14/04;C23C14/50;C23C14/56;C23C16/04;C23C16/40;C23C16/44;C23C16/455;C23C16/458;C23C16/511;C23C16/54;(IPC1-7):C23C16/04;B65G47/84 |
主分类号 |
B65B55/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
