发明名称 SLIT COATING METHOD AND APPARATUS, AND METHOD OF MANUFACTURING COLOR FILTER
摘要 A method and an apparatus for coating a slit, and a method for manufacturing a color filter are provided to coat coating liquids on a surface of a substrate stably and uniformly at a high coating speed. A method for coating a slit includes the steps of: cleaning a coating head(S1); detecting a thickness of a substrate(S2); waiting to return the coating head to a place of a cleaning/waiting unit(S3); discharging the dummy by supplying the coating liquid(S4); starting a decompression of a decompression chamber to match a coating height of the coating head(S5); starting a supply of coating liquids to the coating head(S6); and performing a coating process while driving the coating head at a speed of 50 to 500 mm/sec(S7).
申请公布号 KR20080066604(A) 申请公布日期 2008.07.16
申请号 KR20080003369 申请日期 2008.01.11
申请人 FUJIFILM CORPORATION 发明人 TANAKA MITSUTOSHI
分类号 G02B5/20 主分类号 G02B5/20
代理机构 代理人
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