| 摘要 |
PROBLEM TO BE SOLVED: To have a hollow structure which does not deform by pressure, and to restrain a crack, etc. from occurring resulting from thermal stress, etc. in a through electrode or a resin sealed part. SOLUTION: An elastic wave device is provided with: an elastic wave element 12 prepared on a substrate 10; the resin sealed part 20 which has a cavity 16 on the elastic wave element 12, and is prepared on the substrate 10 so as to cover a side surface and a top surface of the cavity 16; the through electrode 40 which passes through the resin sealed part 20 except the cavity 16, and are electrically connected to the elastic wave element 12; connection terminals 48 prepared on the through electrode 40; and a reinforcing layer 30 which is put into the resin sealed part 20 at upper and lower sides on the cavity 16, and has a larger elastic modulus than the resin sealed part 20. Its manufacturing method is also provided. COPYRIGHT: (C)2008,JPO&INPIT
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