| 摘要 |
PROBLEM TO BE SOLVED: To improve yield by preventing from sticking of a vibrating piece. SOLUTION: An oscillation element 30 is provided with a vibrating element 32, which has a vibrating piece 36 that is formed so as to extend in an X direction, toward a tip part 39 from a base-end part 35 and vibrates in a Y direction, orthogonal to the X direction, and a vibration element island 34 for supporting the vibrating piece 36 via the base end-part 35 in a cantilevered state; and electrode parts 33a and 33b, which are disposed so that the vibrating piece 36 is held between them along another direction, in a state where there is a gap (d), with respect to the vibrating piece 36, which generate electrostatic force, when a voltage is applied, and vibrate the vibrating piece 36. In the oscillation element 30, a plurality of projecting parts 49 are formed along the longitudinal direction of electrode part islands 40a and 40b, on the side surfaces 48a and 48b of the electrode part islands 40a and 40b of the electrode parts 33a and 33b. COPYRIGHT: (C)2009,JPO&INPIT
|
