发明名称 |
ELECTROSTATIC MICRO ACTUATOR, ELECTROSTATIC MICROACTUATOR APPARATUS AND DRIVING METHOD OF ELECTROSTATIC MICRO ACTUATOR |
摘要 |
A semiconductor substrate; a cantilever which is formed on the semiconductor substrate so as to face the semiconductor substrate with an air layer therebetween, the cantilever being made from an electrically conductive material or a semiconductor material, and the cantilever being mechanically movable; a photodiode which is formed so as to be connected in parallel to a capacitance that is constituted from the cantilever and the semiconductor substrate, and the photodiode being formed between an anchor portion which is a portion of the cantilever and the semiconductor substrate; and a power source which supplies voltage via a resistance on a side of the cantilever which is a connection point of a parallel circuit including both the capacitance and the photodiode so as to be backward bias to the photodiode, are included.
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申请公布号 |
US2009102006(A1) |
申请公布日期 |
2009.04.23 |
申请号 |
US20050577965 |
申请日期 |
2005.04.07 |
申请人 |
TOSHIYOSHI HIROSHI;FUJITA HIROYUKI;YAMAUCHI YUKO;HIGO AKIO;KAKUSHIMA KUNIYUKI |
发明人 |
TOSHIYOSHI HIROSHI;FUJITA HIROYUKI;YAMAUCHI YUKO;HIGO AKIO;KAKUSHIMA KUNIYUKI |
分类号 |
H01L31/08;G05F1/10 |
主分类号 |
H01L31/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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