| 发明名称 |
ENERGY FILTER FOR COLD FIELD EMISSION ELECTRON BEAM APPARATUS |
| 摘要 |
An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.
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| 申请公布号 |
US2009101819(A1) |
申请公布日期 |
2009.04.23 |
| 申请号 |
US20080234453 |
申请日期 |
2008.09.19 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH |
发明人 |
ZHOU FANG;FROSIEN JURGEN;ADAMEC PAVEL |
| 分类号 |
G01N23/00;G01J1/00 |
主分类号 |
G01N23/00 |
| 代理机构 |
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