发明名称 SPATIALLY LIMITED PROCESSING OF A SUBSTRATE
摘要 A method of chemical processing includes passing a substrate material from a first transfer conveyor device to a second transfer conveyor device across a fluid reservoir so that a first surface of the substrate contacts a fluid within the reservoir and a second surface of the substrate is substantially untouched by the fluid within the reservoir and the first and second transfer conveyor devices are placed substantially outside of the reservoir.
申请公布号 US2016254173(A1) 申请公布日期 2016.09.01
申请号 US201615011333 申请日期 2016.01.29
申请人 KNIGHT Gregory;BERGMAN Michael 发明人 EDGERLY Oscar;KNIGHT Gregory;BERGMAN Michael
分类号 H01L21/677;H01L21/67 主分类号 H01L21/677
代理机构 代理人
主权项 1. A chemical processing device comprising: a reservoir having a first edge and a second edge; a first conveyor device disposed adjacent to said first edge; a second conveyor device disposed adjacent to said second edge such that said first and second edges are disposed between said first and second conveyor devices, said second conveyor device being adapted to receive and support a substrate material from said first conveyor device, whereby one surface of said substrate material contacts a fluid material disposed within said reservoir during a transition from said first conveyor device to said second conveyor device while a further surface of said substrate material remains substantially un-contacted by said fluid material.
地址 Winchester MA US