LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND METHOD FOR MANUFACTURING HEAT TREATMENT APPARATUS

摘要

A sealing structure is achieved by sandwiching an O ring between an upper chamber window and a chamber side portion and pressing a clamping ring against a top of a peripheral portion of the upper chamber window. Grooving is performed on a lower surface and an upper surface of the peripheral portion of the upper chamber window, to thereby form a plurality of grooves thereon. Flash light traveling into the peripheral portion of the upper chamber window during irradiation with flash light is reflected by the plurality of grooves and is prevented from traveling toward the O ring. This significantly reduces an amount of flash light reaching the O ring, and thus degradation of the O ring due to the irradiation with the flash light can be prevented.

主权项

1. A heat treatment apparatus that irradiates a substrate with flash light to heat the substrate, comprising:
a chamber housing a substrate; a retaining portion retaining the substrate in the chamber; a flash lamp provided outside the chamber and on one side of the chamber; a quartz window covering an opening of the one side of the chamber; an O ring sandwiched between a side wall of the chamber and a contact surface of a peripheral portion of the quartz window; and a window holding-down member pressing a counter surface opposed to the contact surface of the peripheral portion of the quartz window against the side wall of the chamber, wherein a light-exposure blocking portion blocking light that is emitted from the flash lamp and travels into the peripheral portion of the quartz window from reaching the O ring is formed in the peripheral portion of the quartz window.