发明名称 ETCHANT COMPOSITION AND MANUFACTURING METHOD OF AN ARRAY FOR LIQUID CRYSTAL DISPLAY
摘要 The present invention relates to an etchant composition having increased capacity about copper and a manufacturing method of an array substrate for a liquid crystal display device. The etchant composition comprises: 5 to 25 wt% of hydrogen peroxide; 0.01 to 3.0 wt% of a fluorine containing compound; 0.1 to 3.0 wt% of an azole compound; 0.1 to 3.0 wt% of organic peracides; 1.0 to 3.0 wt% of a chelate agent; 1.0 to 3.0 wt% of a hydrogen peroxide stabilizer; and remaining water, with respect to total weight percentage of the composition.
申请公布号 KR20160112472(A) 申请公布日期 2016.09.28
申请号 KR20150038247 申请日期 2015.03.19
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 JUNG, SUNG MIN;KIM, RYUN TAK;YANG, GYU HYUNG
分类号 C09K13/08;C23F1/18;G02F1/1333;H01L21/306 主分类号 C09K13/08
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