发明名称 |
ETCHANT COMPOSITION AND MANUFACTURING METHOD OF AN ARRAY FOR LIQUID CRYSTAL DISPLAY |
摘要 |
The present invention relates to an etchant composition having increased capacity about copper and a manufacturing method of an array substrate for a liquid crystal display device. The etchant composition comprises: 5 to 25 wt% of hydrogen peroxide; 0.01 to 3.0 wt% of a fluorine containing compound; 0.1 to 3.0 wt% of an azole compound; 0.1 to 3.0 wt% of organic peracides; 1.0 to 3.0 wt% of a chelate agent; 1.0 to 3.0 wt% of a hydrogen peroxide stabilizer; and remaining water, with respect to total weight percentage of the composition. |
申请公布号 |
KR20160112472(A) |
申请公布日期 |
2016.09.28 |
申请号 |
KR20150038247 |
申请日期 |
2015.03.19 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
JUNG, SUNG MIN;KIM, RYUN TAK;YANG, GYU HYUNG |
分类号 |
C09K13/08;C23F1/18;G02F1/1333;H01L21/306 |
主分类号 |
C09K13/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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