SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHODS THEREOF

摘要

A method of manufacturing a semiconductor substrate includes forming a first semiconductor layer on a substrate, forming a metallic material layer on the first semiconductor layer, forming a first portion of a second semiconductor layer on the first semiconductor layer and the metallic material layer, removing the metallic material layer under the first portion of the second semiconductor layer by dipping the substrate in a solution, forming a second portion of the second semiconductor layer on the first portion of the second semiconductor layer, and forming a cavity entirely through a portion of the first semiconductor layer located under where the metallic material layer was removed.

主权项

1. A method of manufacturing a semiconductor substrate, the method comprising:
forming a first semiconductor layer on a substrate; forming a metallic material layer on the first semiconductor layer; forming a first portion of a second semiconductor layer on the first semiconductor layer and the metallic material layer; removing the metallic material layer under the first portion of the second semiconductor layer by dipping the substrate in a solution; forming a second portion of the second semiconductor layer on the first portion of the second semiconductor layer; and forming a cavity entirely through a portion of the first semiconductor layer located under where the metallic material layer was removed.