| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma working device capable of increasing working precision at the time of subjecting a sheet shaped working material obtd. by laminating plural materials different in thermal expansion coefficients to dry etching. SOLUTION: This device is provided with a fixing jig placed on a planar electrode 11, the fixing jig is composed of the combination of a tray 20 having a projecting part 21 with a shape having a projecting carvature only in a uniaxial direction and a framelike pallet 30. The projecting part 21 of the tray 20 has a size same as that of the hollow part in the pallet 30, the pallet 30 is composed so as to be extended to the hollow part with the working material S sandwiched by the relative two sides, and by overlapping the pallet 30 extensively provided with the working material S on the tray 20, the working material S is made adhesive along the projecting part 21 of the tray 20. The local temp. distribution in the process of working reduces, and stable working under high throughput is made possible without reducing working precision. |
