ACCELERATION SENSOR AND INCLINATION-DETECTING METHOD
摘要
An acceleration sensor (10) for detecting the inclinational deviation of an article from its basic position has a sensor chip for detecting an inclinational deviation, the sensor chip including a detecting axis or two intersecting detecting axes. An axis perpendicular to the detecting surface of the sensor chip is provided so as to be parallel to a reference surface of the article in the basic position. The sensor chip obtains an output signal in accordance with an inclinational deviation of the reference surface.
申请公布号
WO2004081584(A1)
申请公布日期
2004.09.23
申请号
WO2004JP01444
申请日期
2004.02.10
申请人
TOKYO ELECTRON LIMITED;HARADA, MUNEO;IKEUCHI, NAOKI;HASHIMOTO, HIROYUKI