发明名称 |
Method for producing air gaps using nanotubes |
摘要 |
A target layer comprising at least one degradable material is deposited on a support. Nanotubes are then formed on the degradable material of the target layer before deposition of an insulating layer is performed. Degradation of the degradable material and elimination of degradation sub-products are then performed by means of the nanotubes passing through the insulating layer thus forming air gaps in the target layer.
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申请公布号 |
US8017025(B2) |
申请公布日期 |
2011.09.13 |
申请号 |
US20080149879 |
申请日期 |
2008.05.09 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
GAILLARD FREDERIC-XAVIER;COIFFIC JEAN-CHRISTOPHE |
分类号 |
C23F1/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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