| 摘要 |
PROBLEM TO BE SOLVED: To provide a scattered ion analyzer capable of reducing a measurement time when improvement of resolution or resolution is the same as that of the conventional technology. SOLUTION: The scattered ion analyzer includes: a drawer member 20 with a drawer aperture 21; a magnetic field formation unit 30 for deflecting the conducting direction of scattered ions along a deflection surface S; an ion detector 40 for detecting the position of a scattered ion; a magnetic lens 50 located the intermediate position between the drawer member 20 and the magnetic formation unit 30, for diverging or focusing scattered ions passing through the drawer aperture 21 along the direction perpendicular to a line C connecting between the center of the aperture of the drawer aperture 21 and the irradiation position of ion beams in a sample T in a deflection surface S, in which the magnetic lens 50 diverges or focuses the scattered ions passing the drawer aperture 21 so as to focus scattered ions, which are scattered at the same depth in the sample T, of the scattered ions passing through the magnetic formation unit 30, by an ion detector 40. COPYRIGHT: (C)2009,JPO&INPIT
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