| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of an inspection apparatus, such as, a minute line width measuring device, wherein an image of low contrast is provided dependently on a measured pattern because the black level of a camera is fixed and light quantity is adjusted by a dimmer. SOLUTION: This inspection apparatus is provided with an image processing section, a microscope, a light source, the dimmer for adjusting the light quantity of the light source, a camera, and a control section for performing dimming by the dimmer based on the luminance value of the image and setting the black level of the camera at the optimal value with a measuring pattern. The black level of the camera is set at an optimal value for each measuring pattern, based on the number of the lowest luminance, thereby acquiring an image of high contrast. Thus, the dynamic range of the camera can be utilized effectively, and accurate measurements can be made. COPYRIGHT: (C)2009,JPO&INPIT
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