| 摘要 |
MEMS and/or NEMS pressure sensor including, in a substrate: a stationary portion and a portion that is movable relative to the stationary portion, the movable portion comprising a sensitive element (108) that is able to move in the plane of the sensor under the effect of a pressure variation; a stress gauge (18) for detecting the movement of the sensitive element (108) in the plane of the sensor due to the pressure variation; electrodes (24.1, 24.2) for actuating the sensitive element, said actuating electrodes being borne partially by the stationary portion and partially by the movable portion, said actuating electrodes being commanded so as to automatically control positionwise the movement of the sensitive element (108); and means (C) for commanding the actuating electrodes, which are configured, on the basis of signals emitted by the gauge, to bias the actuating electrodes so as to automatically control positionwise the movement of the sensitive element. |
