METHOD AND APPARATUS OF CHARGING UNKNOWN MICRO-CHANNEL DEVICES WITH A SMALL AND EXACT QUANTITY OF ANY FLUID IN VACUUM ENVIRONMENT

摘要

A method and an apparatus for charging a micro-channel device with a small and fixed quantity fluid in a vacuum environment are provided to repeatedly and accurately charge a micro-channel device having unknown micro-channels and volume with a small amount of a fluid at a fixed quantity rate. Mass of an object(2) to be charged is gauged. The object to be charged is installed at a micro fixed quantity flux charging device(1) to be exhausted up to a set vacuum degree. The object is charged with a fluid and mass of the object is gauged. The fluid is removed. Charging process data is obtained. An appropriate vacuum degree and a fixed quantity charging amount according to time are decided from the obtained charging process data. A vacuum chamber is charged with a fluid based on the decided appropriate vacuum degree and the fixed quantity charging amount.