| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a droplet ejecting head capable of improving a yield by enhancing the adhesion between a diaphragm and a piezoelectric element, and to provide a droplet ejector. SOLUTION: The method for manufacturing a droplet ejecting head comprises a diaphragm 55 which is formed a metal oxide layer 65 at least on one side of a surface, a lower electrode 4 arranged on the metal oxide layer 65 of the diaphragm 55, and a piezoelectric element 54 in which a piezoelectric layer 5 is pinched between the lower electrode 4 and a upper electrode 6. The surface of the metal oxide layer 65 is surface-treated for reduction and metalization. In addition, the lower electrode 4 is formed on the metal oxide layer 65 which is metalized by the surface treatment. Furthermore, the piezoelectric element 54 including the lower electrode 4 is formed. COPYRIGHT: (C)2007,JPO&INPIT
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