| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage apparatus which improves exposure accuracy, whose weight is light, which is manufactured at low cost, and in which a work stage can move in a plain surface. <P>SOLUTION: A stage apparatus comprises a work stage 5 comprising a honeycomb core 7, a platen 8 which is attached to the lower surface of the honeycomb core 7, on which a concave electrode is formed, and which comprises a magnetic substance, and a suction board 6 which is attached to the upper surface of the honeycomb core 7, which holds a work 12 in a suctioning manner, and which is composed of a material different from that of the platen 8, support members 3 and 4 for supporting the work stage 5 by air floating, and thrust force generating means 2 having a magnetic pole for generating a shifting magnetic field for making the work stage 5 move in a plain surface. In the stage apparatus, the work stage 5 is floated by air and the work stage 5 can move in the plain surface. <P>COPYRIGHT: (C)2008,JPO&INPIT |
