| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid for a liquid immersion having a high transmission factor at 193.4 nm, hard to deteriorate due to an exposure, and excellent in the reusability of the liquid. <P>SOLUTION: The liquid for the liquid immersion exposure is used for a device and a method of liquid immersion exposure for exposure through the liquid filled between a projection optical system and a lens substrate. The liquid comprises a trans-decahydronaphthalene with a content of a cis-decahydronaphthalene less than 0.05 mass%. The trans-decahydronaphthalene is the liquid refined by a precision refining, and further refined by a concentrated sulfric acid. <P>COPYRIGHT: (C)2008,JPO&INPIT |
