| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a tuning fork type crystal vibration chip by which neither a step nor a groove is formed at the root (26) of a pair of vibrating arms (21), and also to provide a method of manufacturing a crystal vibrating device. <P>SOLUTION: The present invention relates to the method of manufacturing the tuning fork type crystal vibration chip which has a base portion and a first vibrating arm and a second vibrating arm each extending from one end portion of the base portion. The method of manufacturing the tuning fork type crystal vibration chip includes steps of: (step S163) forming a first metal film (93) having an outward shape of the base (29), of the first vibrating arm (21), and of the second vibrating arm (21); and (step S166) forming a second metal film (98) which has the outward shape of the base portion, of the first vibrating arm, and of the second vibrating arm, and covers at least an area on the base portion side between the first vibrating arm and second vibrating arm on a second surface on the opposite side from the first surface. <P>COPYRIGHT: (C)2008,JPO&INPIT |
