| 摘要 |
PROBLEM TO BE SOLVED: To provide a chamber for test of a semiconductor device capable of continuously performing the test while switching the temperature condition from a low-temperature zone to a high-temperature zone or from the high-temperature zone to the low-temperature zone. SOLUTION: This chamber comprises testing units U capable of storing each socket board 200, a temperature adjusting means, a tester board unit 300 disposed in each testing unit, and a microcomputer 100. The temperature adjusting means comprises a heating means for supplying the first atmosphere for heating the semiconductor device in a case, a cooling means for supplying the second atmosphere for cooling the semiconductor device, a normal-temperature air supplying means for supplying normal-temperature air, and electromagnetic valves (30a-30l and 31a-31l) for switching the heating means, cooling means, and normal-temperature air supplying means with a predetermined timing with a microcomputer. COPYRIGHT: (C)2008,JPO&INPIT
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