发明名称 DEVICE FOR THE TRANSPORT, STORAGE AND TRANSFER OF SUBSTRATES
摘要 <p>According to the invention, a transport box (1) may be connected to an interface (2), and contain a basket (3) in which the substrates (4) may be placed. The basket (3) consists of a set of plates (3a-3f), stacked one after the other and individually replaceable. The basket (3) is entirely shifted to the interior of the interface (2), then the means of movement isolating a selected plate by moving the adjacent plates, allowing the robot (5) to come and extract the selected substrate. When in a transport position, the plates (3a-3f) are in contact with each other, therefore reducing the amount of space taken up by the substrates (4).</p>
申请公布号 KR20090028623(A) 申请公布日期 2009.03.18
申请号 KR20097000343 申请日期 2007.05.31
申请人 ALCATEL LUCENT 发明人 SYLVESTRE RAPHAEL;GODOT ERWAN;SOGAN GLORIA
分类号 H01L21/677;H01L21/673 主分类号 H01L21/677
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