| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-quality microphone unit having a small external form and high noise removal, and to provide a manufacturing method thereof. SOLUTION: The microphone unit has a case 701 having an internal space; a wiring substrate 704, which is provided in the case, divides the internal space into a first space 709 and a second space 710, and at least partially includes a vibrating film 703; and an amplifier part 705 mounted on the wiring substrate to output an electrical signal on the basis of vibrations of the vibrating film. In the case, a first through-hole 706 for making the first space communicate with the external space of the case, a second through-hole 707 for making the second space communicate with the external space of the case, and an electrode part 708 connected to the amplifier part are formed. COPYRIGHT: (C)2009,JPO&INPIT
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