Plasmonic interface and method of manufacturing thereof

摘要

A method of manufacturing a layered material stack that includes a plasmonic interface between a plasmonic material and optical waveguide material is disclosed. The method includes providing a substrate layer, disposing a layer of plasmonic material on the substrate layer, depositing a metal constituent of an optical waveguide material directly onto the layer of plasmonic material, and anodizing the metal constituent of the optical waveguide material to form an optically transparent oxide of the metal constituent configured to couple light into the layer of plasmonic material, with the optically transparent oxide of the metal constituent forming an optical waveguide structure.

主权项

1. A method of manufacturing a layered material stack comprising:
providing a substrate layer; disposing a layer of plasmonic material on the substrate layer; depositing a metal constituent of an optical waveguide material directly onto the layer of plasmonic material; and anodizing the metal constituent of the optical waveguide material to form an optically transparent oxide of the metal constituent configured to couple light into the layer of plasmonic material, the optically transparent oxide of the metal constituent forming an optical waveguide structure; wherein anodizing the metal constituent of the optical waveguide material comprises applying an electric current to the metal constituent of the optical waveguide material through the layer of plasmonic material, the layer of plasmonic material functioning as an electrode for performing the anodization.