SPECTROMETER, MONOCHROMAToR, DIFFRACTION GRATING AND METHODS OF MANUFACTURING GRATING AND MOLD

摘要

A diffraction grating comprise a substrate and a plurality of connected diffraction structures formed on the substrate. Each diffraction structure is in the shape of a column and arranged along a concave cylindrical surface, and an axis of each diffraction structure extends along a generatrix of the concave cylindrical surface. A section contour is obtained by a cross section of the diffraction structures. The cross section is perpendicular to each axis of the diffraction structure. The section contour shows the connecting line of apexes of the diffraction structures as a reference curve having a plurality of first inflection points, wherein the diffraction structures are configured for separating the optical signal into a plurality of spectral components and focusing the spectral components onto a focal surface.

主权项

1. A method of manufacturing a diffraction grating comprising:
providing a substrate, wherein the substrate has a concave cylindrical surface; and forming a plurality of connected diffraction structures on the concave cylindrical surface, each diffraction structure being in the shape of a column, and an axis of each diffraction structure extending along a generatrix of the concave cylindrical surface, wherein a section contour is obtained by a cross section of the diffraction structures; the cross section is perpendicular to each axis of the diffraction structure; and the section contour shows the connecting line of apexes of the diffraction structures as a reference curve having a plurality of first inflection points.