| 摘要 |
The invention provides an examination apparatus that is capable of observing a specimen in a stationary state while suppressing blurring caused by a control delay. The examination apparatus includes a first optical system and a second optical system for imaging light produced in a specimen, a first image-acquisition unit provided with a plurality of first image-acquisition devices for detecting an image formed by the first optical system, a second image-acquisition unit provided with a second image-acquisition device for acquiring an image formed by the second optical system, and a driving unit configured to cause the images to be formed at substantially the same position in the second image-acquisition unit based on a detection signal of the first image-acquisition unit. The value obtained by dividing the pixel size Y of the first image-acquisition devices by the magnification X of the first optical system is smaller than the value obtained by dividing the pixel size Y' of the second image-acquisition device by the magnification X' of the second optical system.
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