| 摘要 |
PROBLEM TO BE SOLVED: To provide a photo-detection element capable of accurately performing evaluation test of light-emitting elements over a wide wavelength region of laser beams and achieving apparatus compactness and low cost, and to provide a light-emitting element testing apparatus using the same. SOLUTION: The photo-detection element includes a first electrically-conductive semiconductor substrate 101; a second electrically-conductive impurity semiconductor region 104 formed in part of the upper surface of the semiconductor substrate; and a laminate having a large number of openings in a light-receiving surface on the upper-surface side of the second electrically-conductive impurity semiconductor region. The laminate includes both a light-reflective metal film 106, which forms a lower layer, and a light-nonreflective plated black film 107, which forms an upper layer for reducing optical reflection by a large number of irregularities in its surface. COPYRIGHT: (C)2008,JPO&INPIT
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