发明名称 PROTECTIVE FILM-FORMING FILM, SHEET FOR PROTECTIVE FILM, COMPLEX SHEET FOR FORMING PROTECTIVE FILM, AND METHOD OF PRODUCING MANUFACTURED PRODUCT
摘要 Provided is protective film-forming sheet (2) including: a protective film-forming film (1) having a light transmittance at a wavelength of 1064 nm of 55% or greater and a light transmittance at a wavelength of 550 nm of 20% or less; and a release sheet (21) which is laminated on one or both faces of the protective film-forming film (1). According to this protective film-forming sheet (2), it is possible to form a protective film which allows a workpiece such as a semiconductor wafer to have a modified layer disposed in advance therein by a laser so that the workpiece can be split through the application of force thereon, while preventing grinding marks on the workpiece or a product formed therefrom from being visible to the naked eye.
申请公布号 SG11201606008W(A) 申请公布日期 2016.08.30
申请号 SG11201606008W 申请日期 2015.01.21
申请人 LINTEC CORPORATION 发明人 YAMAMOTO, DAISUKE;YONEYAMA, HIROYUKI
分类号 H01L21/02;C09J7/02;H01L21/301 主分类号 H01L21/02
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