PROTECTING AN INTERIOR OF A GAS CONTAINER WITH AN ALD COATING
摘要
An apparatus and method for protecting a gas container interior, where an inlet and exhaust manifold include a port assembly attachable to a port of the gas container is provided, the gas container interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the port into the gas container interior, and reaction residue is pumped via the port and the port assembly out from the gas container.
申请公布号
SG11201605837T(A)
申请公布日期
2016.08.30
申请号
SGT11201605837
申请日期
2014.03.03
申请人
PICOSUN OY
发明人
SAMMELSELG, VÄINO;KOSTAMO, JUHANA;BAYERL, WILLI;AARIK, JAAN;AARIK, LAURI;LINDFORS, SVEN;ADAM, PETER;POUTIAINEN, JUHO