ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, MASK BLANK PROVIDED WITH ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PHOTOMASK, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE

摘要

An actinic ray-sensitive or radiation-sensitive resin composition includes an alkali-soluble resin (A) having a phenolic hydroxyl group, and a crosslinking agent (C) having two or more hydroxymethyl groups or alkoxymethyl groups in total within the molecule, wherein the composition contains a crosslinking agent (C1) having a molecular weight of 420 or more and also having two to four hydroxymethyl groups or alkoxymethyl groups in total within the molecule in a proportion of 60 mol % to 100 mol % based on the total amount of the crosslinking agent (C) including the crosslinking agent (C1), and in which the total concentration of the hydroxymethyl groups or the alkoxymethyl groups of the crosslinking agent (C) relative to 1 g of the solid content in the actinic ray-sensitive or radiation-sensitive resin composition is 0.30 mmol/g or more.

主权项

1. An actinic ray-sensitive or radiation-sensitive resin composition comprising:
an alkali-soluble resin (A) having a phenolic hydroxyl group; and a crosslinking agent (C) having two or more hydroxymethyl groups or alkoxymethyl groups in total within the molecule, wherein the crosslinking agent (C) includes a crosslinking agent (C1), the crosslinking agent (C1) has a molecular weight of 420 or more and also has two to four hydroxymethyl groups or alkoxymethyl groups in total within the molecule, a content of the crosslinking agent (C1) is 60 mol % to 100 mol % based on a total amount of the crosslinking agent (C), and a total concentration of hydroxymethyl groups or alkoxymethyl groups in the crosslinking agent (C) is 0.30 mmol/g or higher relative to 1 g of a solid content in the actinic ray-sensitive or radiation-sensitive resin composition.